2 May 2005 Mechanical errors related to interferometric radius of curvature measurements; Technical Digest
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Abstract
The measurement of radius of curvature through the use of an interferometer can be a very accurate way to understand the properties of an optical surface. This process is completed by observing the distance between the cat's eye and confocal points of an optical piece. This type of measurement process, however, can include a number of errors if not executed properly. This paper presents and explains the major sources of mechanical errors that exist for radius of curvature measurements. The major mechanical errors that may occur are Abbe, cosine, and null cavity error. These errors are presented in a fashion such that they may be easily understood by someone who may not have an extensive optics background. Also, some techniques to test for and assess these errors will be displayed. In order to make extremely accurate measurements, on the order of a nanometer, one must greatly diminish the mechanical errors of a system before examining the effects of environmental errors.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Patrick J. McGhee, John Nemechek, "Mechanical errors related to interferometric radius of curvature measurements; Technical Digest", Proc. SPIE 10315, Optifab 2005: Technical Digest, 1031519 (2 May 2005); doi: 10.1117/12.605853; https://doi.org/10.1117/12.605853
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