14 May 2007 Encompassing spatial frequency requirements in optical metrology
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Traditionally, optical surface specifications have been given for figure and finish. Surface figure covered the low spatial frequencies and finish covered high spatial frequencies. Scratch/dig was used as a cosmetic specification for the quality of the surface. In the more recent past, advances in optical fabrication have enabled production of more complex surface shapes. This has led to a greater need to specify surfaces across a continual spatial frequency spectrum. In this paper we discuss metrology considerations and calculations necessary to produce surfaces to such requirements, including an example with measurements. The results are applicable to various surface specifications including amplitude spectral density, power spectral density, structure functions, or slope specification. The results also are applicable to a variety of optical metrology methods.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Richard N. Youngworth, Richard N. Youngworth, Kathleen S. Youngworth, Kathleen S. Youngworth, } "Encompassing spatial frequency requirements in optical metrology", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103160K (14 May 2007); doi: 10.1117/12.721152; https://doi.org/10.1117/12.721152


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