14 May 2007 High precision interferometer for measuring mid-spatial frequency departure in free form optics
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Abstract
Spherical-reference objectives, retrace error correction and environmental (vibration) compensation are incorporated into a scanning white light microscope to enable high-precision measurements of precision optics over a mid-spatial frequency range from 1 and 500 mm-1. The complete metrology platform with automated calibration and positioning demonstrates a measurement repeatability of less than 65pm, while achieving a global uncertainty of less than 100pm for surfaces up to 450mm in size and aspheric departures up to 2 &mgr;m/mm. Keywords: Interferometry, optics, aspheres, metrology.
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Leslie L. Deck, "High precision interferometer for measuring mid-spatial frequency departure in free form optics", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103160N (14 May 2007); doi: 10.1117/12.719404; https://doi.org/10.1117/12.719404
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