14 May 2007 Compensation of vibration errors in high-performance interferometry
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Here I describe results of a method for reducing the influence of vibrations in PSI using the spatial information in the interference intensity images to achieve as much as 100X reduction in induced surface distortion for small-amplitude vibrations. The interference patterns are first normalized for the distribution in illumination across the field of view by measuring the empty-cavity intensity distribution of light reflected from the reference surface prior to measuring the object. The technique then determines the phase increments between acquired frames by comparing the measured interference intensity patterns, and then uses these increments to recalculate a vibration-corrected profile. This approach does not require spatial carrier fringes and maintains full lateral sampling resolution. The method can be applied to any PSI acquisition, and is compatible with most surface shapes encountered in optical testing, including flats, spheres and mild aspheres. Unlike carrier-fringe techniques, as few as one or two interference fringes are sufficient for calculating the phase increments.
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Leslie L. Deck, Leslie L. Deck, } "Compensation of vibration errors in high-performance interferometry", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103160V (14 May 2007); doi: 10.1117/12.719429; https://doi.org/10.1117/12.719429


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