14 May 2007 On-axis, non-contact measurement of glass thicknesses and airgaps in optical systems with submicron accuracy
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Abstract
This technical summary presents the fiber-optics interferometric sensor LISE and its applications in the optics industry. The summary explains the measurement principle (Section 1), describes the hardware system components (Section 2) and gives results of an experimental accuracy validation (Section 3). Section 4 illustrates the application of the sensor as a metrology tool for optics manufacturing.
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Rainer Wilhelm, Alain Courteville, Fabrice Garcia, François de Vecchi, "On-axis, non-contact measurement of glass thicknesses and airgaps in optical systems with submicron accuracy", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103160X (14 May 2007); doi: 10.1117/12.723546; https://doi.org/10.1117/12.723546
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