14 May 2007 On-axis, non-contact measurement of glass thicknesses and airgaps in optical systems with submicron accuracy
Author Affiliations +
Abstract
This technical summary presents the fiber-optics interferometric sensor LISE and its applications in the optics industry. The summary explains the measurement principle (Section 1), describes the hardware system components (Section 2) and gives results of an experimental accuracy validation (Section 3). Section 4 illustrates the application of the sensor as a metrology tool for optics manufacturing.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rainer Wilhelm, Rainer Wilhelm, Alain Courteville, Alain Courteville, Fabrice Garcia, Fabrice Garcia, François de Vecchi, François de Vecchi, } "On-axis, non-contact measurement of glass thicknesses and airgaps in optical systems with submicron accuracy", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103160X (14 May 2007); doi: 10.1117/12.723546; https://doi.org/10.1117/12.723546
PROCEEDINGS
4 PAGES


SHARE
RELATED CONTENT

SIM external metrology beam launcher (QP) development
Proceedings of SPIE (February 25 2003)
Scan Interferometer
Proceedings of SPIE (January 15 1989)
Space Interferometry Mission (SIM) thermal design
Proceedings of SPIE (February 25 2003)
Optical figure testing by scanning deflectometry
Proceedings of SPIE (September 05 1999)

Back to Top