14 May 2007 Surface and thickness metrology using scanning low-coherence dual interferometry (SLCDI)
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Abstract
We present experimental results for a low-coherence, dual-wavelength metrology system capable of measuring simultaneously both optical thickness and surface figure. The system measures optical thicknesses as thin as 12 microns to as wide as 12 mm with an accuracy of 0.1 microns. The current system scans at a resolution of 50 microns, which is limited by the spot-size of the measurement beam. We validate that SLCDI yields results in agreement with traditional interferometry and demonstrate its ability to measure aspheric “saddle” mirrors and complex three-dimensional surfaces.
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Christopher J. Ditchman, Christopher Cotton, Damon W. Diehl, "Surface and thickness metrology using scanning low-coherence dual interferometry (SLCDI)", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103161Z (14 May 2007); doi: 10.1117/12.718724; https://doi.org/10.1117/12.718724
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