14 May 2007 Measurement of aspheric surfaces with 3D-deflectometry
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Abstract
Using a high resolution two-dimensional angle sensor, 3D-Deflectometry determines the local slopes of an aspheric surface. The sensor scans the surface in spherical coordinates thus measuring the deviation from a reference sphere. A new fault tolerant software algorithm transfers slope information into surface topography data simultaneously correcting for systematic errors of the instrument. In this way various surface types can be characterized; convex and concave standard shapes as well as toric or even free form surfaces.
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I. Scheele, I. Scheele, S. Krey, S. Krey, J. Heinisch, J. Heinisch, } "Measurement of aspheric surfaces with 3D-deflectometry", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103160P (14 May 2007); doi: 10.1117/12.719713; https://doi.org/10.1117/12.719713
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