30 August 2017 Future lithography technology
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Proceedings Volume 10320, An Introduction to Biological and Artificial Neural Networks for Pattern Recognition; 1032005 (2017) https://doi.org/10.1117/12.2284078
Event: Tutorial Texts in Optical Engineering Series 1991, 1991, Bellingham, WA, United States
Abstract
Introduction-Lithography is the key enabler for semiconductor manufacturing. Future Progress in circuit scaling depends on contrinued progress in lithography capability scaling. Lithograph is once again approaching a "barrier" where exisiting technology does not demonstrate a clear path for continued progress. We will explore some continuities and discontinuities in lithography that promise to drive the scaling process for many years.
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Gene Fuller, Gene Fuller, } "Future lithography technology", Proc. SPIE 10320, An Introduction to Biological and Artificial Neural Networks for Pattern Recognition, 1032005 (30 August 2017); doi: 10.1117/12.2284078; https://doi.org/10.1117/12.2284078
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