Integrated Sagnac optical gyroscope sensor using ultra-low loss high aspect ratio silicon nitride waveguide coil

Sarat Gundavarapu; Michael Belt; Taran Huffman; Minh A. Tran; Tin Komljenovic; John E. Bowers; Daniel J. Blumenthal

doi:10.1117/12.2263411

23 April 2017 Integrated Sagnac optical gyroscope sensor using ultra-low loss high aspect ratio silicon nitride waveguide coil

Sarat Gundavarapu, Michael Belt, Taran Huffman, Minh A. Tran, Tin Komljenovic, John E. Bowers, Daniel J. Blumenthal

Author Affiliations +

Proceedings Volume 10323, 25th International Conference on Optical Fiber Sensors; 103231A (2017) https://doi.org/10.1117/12.2263411
Event: 25th International Conference on Optical Fiber Sensors, 2017, Jeju, Korea, Republic of

Abstract

We demonstrate operation of an interferometric optical gyroscope that uses an on-chip 3m ultra-low-loss silicon nitride waveguide coil. The measured minimum waveguide loss of the waveguide coil fabricated using lithographic die stitching was 0.78 dB/m. The angle random walk and bias instability of the gyroscope were characterized to be 8.52 deg/hr^1/2 and 58.7 deg/hr respectively.

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Sarat Gundavarapu, Michael Belt, Taran Huffman, Minh A. Tran, Tin Komljenovic, John E. Bowers, and Daniel J. Blumenthal "Integrated Sagnac optical gyroscope sensor using ultra-low loss high aspect ratio silicon nitride waveguide coil", Proc. SPIE 10323, 25th International Conference on Optical Fiber Sensors, 103231A (23 April 2017); https://doi.org/10.1117/12.2263411

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