23 April 2017 Integrated Sagnac optical gyroscope sensor using ultra-low loss high aspect ratio silicon nitride waveguide coil
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Proceedings Volume 10323, 25th International Conference on Optical Fiber Sensors; 103231A (2017) https://doi.org/10.1117/12.2263411
Event: 25th International Conference on Optical Fiber Sensors, 2017, Jeju, Korea, Republic of
Abstract
We demonstrate operation of an interferometric optical gyroscope that uses an on-chip 3m ultra-low-loss silicon nitride waveguide coil. The measured minimum waveguide loss of the waveguide coil fabricated using lithographic die stitching was 0.78 dB/m. The angle random walk and bias instability of the gyroscope were characterized to be 8.52 deg/hr1/2 and 58.7 deg/hr respectively.
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Sarat Gundavarapu, Sarat Gundavarapu, Michael Belt, Michael Belt, Taran Huffman, Taran Huffman, Minh A. Tran, Minh A. Tran, Tin Komljenovic, Tin Komljenovic, John E. Bowers, John E. Bowers, Daniel J. Blumenthal, Daniel J. Blumenthal, } "Integrated Sagnac optical gyroscope sensor using ultra-low loss high aspect ratio silicon nitride waveguide coil", Proc. SPIE 10323, 25th International Conference on Optical Fiber Sensors, 103231A (23 April 2017); doi: 10.1117/12.2263411; https://doi.org/10.1117/12.2263411
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