23 April 2017 A miniaturized ferrule-top optical cantilever for vibration measurement
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Proceedings Volume 10323, 25th International Conference on Optical Fiber Sensors; 103232X (2017) https://doi.org/10.1117/12.2263956
Event: 25th International Conference on Optical Fiber Sensors, 2017, Jeju, Korea, Republic of
Abstract
In this paper, we propose techniques to design and fabricate polymer micro-cantilevers for attachment onto the end of standard single mode fibers using laser machining. The polymer cantilever is fabricated by laser micro-machining a sheet of polymer into the required shape and then bonded onto the top of a ceramic ferrule by photo resist as a flat supporting and bonding layer. The dimension of resulting cantilever is ~1.2 mm long, ~300 μm wide, and 25 μm thick. In this work we describe the fabrication of single sensors, however the process could be scaled to offer a route towards mass production. Cantilever vibration caused by vibration signal are monitored by a DFB laser based phase interrogation system. Proof-of-concept experiments show that the sensor is capable of detecting vibration signal with a frequency range of 0-800Hz. By using thinner polymer sheet and machining longer cantilever, the frequency response range can be extended up to a few kHz.
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J. Li, S. M. Xu, J. N. Sun, Y. Q. Tang, F. Z. Dong, "A miniaturized ferrule-top optical cantilever for vibration measurement", Proc. SPIE 10323, 25th International Conference on Optical Fiber Sensors, 103232X (23 April 2017); doi: 10.1117/12.2263956; https://doi.org/10.1117/12.2263956
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