Paper
23 April 2017 Sapphire Fabry-Perot high-temperature sensor study
Yi-qiang Yao, Wei-long Liang, Xinwang Gui, Dian Fan
Author Affiliations +
Proceedings Volume 10323, 25th International Conference on Optical Fiber Sensors; 1032334 (2017) https://doi.org/10.1117/12.2264870
Event: 25th International Conference on Optical Fiber Sensors, 2017, Jeju, Korea, Republic of
Abstract
A new structure sapphire fiber Fabry-Perot (F-P) high-temperature sensor based on sapphire wafer was proposed and fabricated. The sensor uses the sapphire fiber as a transmission waveguide, the sapphire wafer as an Fabry-Perot (F-P) interferometer and the new structure of “Zirconia ferrule-Zirconia tube” as the sensor fixing structure of the sensor. The reflection spectrum of the interferometer was demodulated by a serial of data processing including FIR bandpass filter, FFT (Fast Fourier Transformation) estimation and LSE (least squares estimation) compensation to obtain more precise OPD. Temperature measurement range is from 20 to 1000°C in experiment. The experimental results show that the sensor has the advantages of small size, low cost, simple fabrication and high repeatability. It can be applied for longterm, stable and high-precision high temperature measurement in harsh environments.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yi-qiang Yao, Wei-long Liang, Xinwang Gui, and Dian Fan "Sapphire Fabry-Perot high-temperature sensor study", Proc. SPIE 10323, 25th International Conference on Optical Fiber Sensors, 1032334 (23 April 2017); https://doi.org/10.1117/12.2264870
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KEYWORDS
Sapphire

Sensors

Temperature metrology

Semiconducting wafers

Structured optical fibers

Zirconium dioxide

Adhesives

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