23 April 2017 An optical fiber MEMS pressure sensor using microwave photonics filtering technique
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Proceedings Volume 10323, 25th International Conference on Optical Fiber Sensors; 1032368 (2017) https://doi.org/10.1117/12.2263415
Event: 25th International Conference on Optical Fiber Sensors, 2017, Jeju, Korea, Republic of
Abstract
A fiber-optic micro-electromechanical systems (MEMS) extrinsic Fabry-Perot interferometer (EFPI) pressure sensor exploiting microwave photonics filtering technique is firstly proposed and experimentally demonstrated. A single-bandpass microwave photonic filter (MPF) which mainly consists of a spectrum-sliced light source, a pressurized EFPI, a phase modulator (PM) and a length of dispersion compensating fiber (DCF) is demonstrated. The frequency response of the filter with respect to the pressure is studied. By detecting the resonance frequency shifts of the MPF, the pressure can be determined. The theoretical and experimental results show that the proposed EFPI pressure sensor has a higher resolution and higher speed than traditional methods based on optical spectrum analysis. The sensitivity of the sensor is measured to be as high as 86 MHz/MPa in the range of 0-4MPa.
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Yiping Wang, Yiping Wang, Ming Wang, Ming Wang, Xiaoqi Ni, Xiaoqi Ni, Wei Xia, Wei Xia, Dongmei Guo, Dongmei Guo, Hui Hao, Hui Hao, Qingyu Ma, Qingyu Ma, Wei Zhuang, Wei Zhuang, } "An optical fiber MEMS pressure sensor using microwave photonics filtering technique", Proc. SPIE 10323, 25th International Conference on Optical Fiber Sensors, 1032368 (23 April 2017); doi: 10.1117/12.2263415; https://doi.org/10.1117/12.2263415
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