15 June 2017 Resolution, measurement errors and uncertainties on deflectometric acquisition of large optical surfaces "DaOS"
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Proceedings Volume 10326, Fourth European Seminar on Precision Optics Manufacturing; 1032603 (2017) https://doi.org/10.1117/12.2267513
Event: Fourth European Seminar on Precision Optics Manufacturing, 2017, Teisnach, Germany
Abstract
The basic physical measurement principle in DaOS is the vignettation of a quasi-parallel light beam emitted by an expanded light source in auto collimation arrangement. The beam is reflected by the surface under test, using invariant deflection by a moving and scanning pentaprism. Thereby nearly any curvature of the specimen is measurable. Resolution, systematic errors and random errors will be shown and explicitly discussed for the profile determination error. Measurements for a “plano-double-sombrero” device will be analyzed and reconstructed to find out the limit of resolution and errors of the reconstruction model and algorithms. These measurements are compared critically to reference results that are recorded by interferometry and Deflectometric Flatness Reference (DFR) method using a scanning penta device.
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E. Hofbauer, E. Hofbauer, R. Rascher, R. Rascher, F. Friedke, F. Friedke, R. Kometer, R. Kometer, } "Resolution, measurement errors and uncertainties on deflectometric acquisition of large optical surfaces "DaOS"", Proc. SPIE 10326, Fourth European Seminar on Precision Optics Manufacturing, 1032603 (15 June 2017); doi: 10.1117/12.2267513; https://doi.org/10.1117/12.2267513
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