15 June 2017 Testing micro optics with micro optics
Author Affiliations +
Proceedings Volume 10326, Fourth European Seminar on Precision Optics Manufacturing; 1032609 (2017) https://doi.org/10.1117/12.2271801
Event: Fourth European Seminar on Precision Optics Manufacturing, 2017, Teisnach, Germany
An increasing part of the optic industry’s added value consists of micro optical components. This increases the demand for effective test methods for micro optics. When conventional test methods are transferred to micro optics, special attention should to be paid to diffraction effects, wave front propagation and precise sample imaging. We show how a well-established tool – the Shack-Hartmann wave front sensor (SHWFS) – which uses a micro lens array as a key element, can be used for testing micro lenses. Different measurement configurations for transmitted light and reflected light testing are discussed. A system which takes advantage of a combination of these test configurations to retrieve information on surface quality, wave front performance, focal length, and defects is presented. Measurement results are shown to demonstrate the system performance.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Johannes Pfund, Johannes Pfund, Christian Brock, Christian Brock, Ralf Dorn, Ralf Dorn, } "Testing micro optics with micro optics", Proc. SPIE 10326, Fourth European Seminar on Precision Optics Manufacturing, 1032609 (15 June 2017); doi: 10.1117/12.2271801; https://doi.org/10.1117/12.2271801

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