Vibration isolation and damping in high precision equipment

B. Bukkems; T. Ruijl; J. Simons

doi:10.1117/12.2272166

15 June 2017 Vibration isolation and damping in high precision equipment

B. Bukkems, T. Ruijl, J. Simons

Proceedings Volume 10326, Fourth European Seminar on Precision Optics Manufacturing; 103260D (2017) https://doi.org/10.1117/12.2272166
Event: Fourth European Seminar on Precision Optics Manufacturing, 2017, Teisnach, Germany

Abstract

All systems located in a laboratory environment or factory are subject to disturbances. These disturbances can either come from the surroundings, e.g. floor-induced vibrations, or from the system itself, e.g. stage-induced vibrations. In many cases it is needed to minimize the effect of these disturbances. This can either be done by isolating the system from its disturbance source or by applying damping to the system. In this paper we present various cases in which we have effectively reduced the impact of disturbances on the system’s performance, either by improving its isolation system, by minimizing the impact of stage reaction forces, or by designing polymer damping into the system.

Citation Download Citation

B. Bukkems, T. Ruijl, and J. Simons "Vibration isolation and damping in high precision equipment", Proc. SPIE 10326, Fourth European Seminar on Precision Optics Manufacturing, 103260D (15 June 2017); https://doi.org/10.1117/12.2272166

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