26 June 2017 Polarization and phase shifting interferometry
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Abstract
This publication presents a novel interferometric method for the simultaneous measurement of the phase and state of polarization of a light wave with arbitrary, in particular locally varying elliptical polarization. The mea- surement strategy is based on variations of the reference wave concerning phase and polarization and processing the interference patterns so obtained. With this method, that is very similar to the classical phase shifting interferometry, a complete analysis of spatially variant states of polarization and their phase fronts can be done in one measurement cycle. Furthermore, a direct analysis of specimens under test regarding birefringence and the impact on the phase of the incoming light can be realized. The theoretical description of the investigated methods and their experimental implementation are presented.
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Sergej Rothau, Sergej Rothau, Klaus Mantel, Klaus Mantel, Norbert Lindlein, Norbert Lindlein, } "Polarization and phase shifting interferometry", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032903 (26 June 2017); doi: 10.1117/12.2269720; https://doi.org/10.1117/12.2269720
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