Increasing the accuracy of tilted-wave-interferometry by elimination of systematic errors

Johannes Schindler; Christof Pruss; Wolfgang Osten

doi:10.1117/12.2270395

26 June 2017 Increasing the accuracy of tilted-wave-interferometry by elimination of systematic errors

Johannes Schindler, Christof Pruss, Wolfgang Osten

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 1032904 (2017) https://doi.org/10.1117/12.2270395
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

This work investigates methods to eliminate calibration errors as one of the limiting factors to reduce measurement uncertainty in Tilted-Wave-Interferometry. The correlations between errors in the model parameters and in the measurement result are investigated, taking into account the symmetry of the surface under test. Two schemes for the elimination of such errors are introduced: Rotations around the z-axis allow the removal on non-rotationally symmetric error components. Measurements in lateral shears allow the elimination of calibration errors with higher spatial frequency. The corresponding algorithms and underlying models are explained for both approaches and examples for their application are presented.

Citation Download Citation

Johannes Schindler, Christof Pruss, and Wolfgang Osten "Increasing the accuracy of tilted-wave-interferometry by elimination of systematic errors", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032904 (26 June 2017); https://doi.org/10.1117/12.2270395

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