26 June 2017 Spatial-temporal phase shifting interferometry: suppressing phase errors in dynamic Fizeau interferometer
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Abstract
A spatial-temporal phase shifting interferometry is proposed to suppress the phase errors in dynamic Fizeau interferometer. The process of phase errors suppression in this interferometry includes three steps: (1) utilizing the spatial phase shifting interferometry to calculate the initial phase; (2) viewing all the effects of the error sources as a complex; (3) utilizing the temporal phase shifting interferometry to obtain multiple different initial phases and calculate the average phase. Experimentally, the phase errors are suppressed effectively and the measurement results are in good agreement with those obtained by Zygo GPI interferometer, which verifies that the proposed interferometry is a powerful tool for phase errors suppression in dynamic interferometer.
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Wenhua Zhu, Wenhua Zhu, Lei Chen, Lei Chen, Rihong Zhu, Rihong Zhu, Rui Zhang, Rui Zhang, Donghui Zheng, Donghui Zheng, } "Spatial-temporal phase shifting interferometry: suppressing phase errors in dynamic Fizeau interferometer", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032909 (26 June 2017); doi: 10.1117/12.2271189; https://doi.org/10.1117/12.2271189
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