26 June 2017 High-throughput single-shot hyperspectral interferometer for areal profilometry based on microlens array integral field unit
Author Affiliations +
Abstract
A single-shot technique to measure areal profiles on optically smooth and rough surfaces and for applications in noncooperative environments is presented. It is based on hyperspectral interferometry (HSI), a technique in which the output of a white-light interferometer provides the input to a hyperspectral imaging system. Previous HSI implementations suffered from inefficient utilisation of the available pixels which limited the number of measured coordinates and/or unambiguous depth range. In this paper a >20-fold increase in pixel utilization is achieved through the use of a 2-D microlens array as proposed for integral field units in astronomy applications. This leads to a 35×35 channel system with an unambiguous depth range of 0.88 mm.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pablo D. Ruiz, Pablo D. Ruiz, Jonathan M. Huntley, Jonathan M. Huntley, } "High-throughput single-shot hyperspectral interferometer for areal profilometry based on microlens array integral field unit", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103290G (26 June 2017); doi: 10.1117/12.2272003; https://doi.org/10.1117/12.2272003
PROCEEDINGS
7 PAGES


SHARE
Back to Top