Single-shot multilayer measurement by chromatic confocal coherence tomography

Tobias Boettcher; Marc Gronle; Wolfgang Osten

doi:10.1117/12.2270270

26 June 2017 Single-shot multilayer measurement by chromatic confocal coherence tomography

Tobias Boettcher, Marc Gronle, Wolfgang Osten

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 103290K (2017) https://doi.org/10.1117/12.2270270
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

We propose Chromatic Confocal Coherence Tomography as a new system able to achieve corrected topography measurements of multi-layered specimens by measuring position, thickness and refractive index of each layer simultaneously at each measurement point. This feature is achieved by a combination of a chromatic confocal scheme and an interferometric one. The numerical aperture of the used microscope objective has a significant effect on the measurement uncertainty. Hence, its contribution to uncertainty is discussed in more detail.

Citation Download Citation

Tobias Boettcher, Marc Gronle, and Wolfgang Osten "Single-shot multilayer measurement by chromatic confocal coherence tomography", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103290K (26 June 2017); https://doi.org/10.1117/12.2270270

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