Combination of a fast white-light interferometer with a phase shifting interferometric line sensor for form measurements of precision components

Sören Laubach; Gerd Ehret; Jörg Riebling; Peter Lehmann

doi:10.1117/12.2269520

26 June 2017 Combination of a fast white-light interferometer with a phase shifting interferometric line sensor for form measurements of precision components

Sören Laubach, Gerd Ehret, Jörg Riebling, Peter Lehmann

Author Affiliations +

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 103291D (2017) https://doi.org/10.1117/12.2269520
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

By means of an interferometric line sensor system, the form of a specimen can be measured by stitching several overlapping circular subapertures to form one 3D topography. This concept is very flexible and can be adapted to many different specimen geometries. The sensor is based on a Michelson interferometer configuration that consists of a rapidly oscillating reference mirror in combination with a high-speed line-scan camera. Due to the overlapping areas, movement errors of the scan axes can be corrected.

In order to automatically adjust the line sensor in such a way that it is perpendicular to the measurement surface at a fixed working distance, a white-light interferometer was included in the line-based form-measuring system. By means of a fast white-light scan, the optimum angle of the sensor (with respect to the surface of the specimen) is determined in advance, before scanning the specimen using the line-based sinusoidal phase shifting interferometer. This produces accurate measurement results and makes it possible to also measure non-rotational specimens.

In this paper, the setup of the line-based form-measuring system is introduced and the measurement strategy of the sensor adjustment using an additional white-light interferometer is presented. Furthermore, the traceability chain of the system and the main error influences are discussed. Examples of form measurement results are shown.

Citation Download Citation

Sören Laubach, Gerd Ehret, Jörg Riebling, and Peter Lehmann "Combination of a fast white-light interferometer with a phase shifting interferometric line sensor for form measurements of precision components", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103291D (26 June 2017); https://doi.org/10.1117/12.2269520

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available