26 June 2017 Combination of a fast white-light interferometer with a phase shifting interferometric line sensor for form measurements of precision components
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Abstract
By means of an interferometric line sensor system, the form of a specimen can be measured by stitching several overlapping circular subapertures to form one 3D topography. This concept is very flexible and can be adapted to many different specimen geometries. The sensor is based on a Michelson interferometer configuration that consists of a rapidly oscillating reference mirror in combination with a high-speed line-scan camera. Due to the overlapping areas, movement errors of the scan axes can be corrected.

In order to automatically adjust the line sensor in such a way that it is perpendicular to the measurement surface at a fixed working distance, a white-light interferometer was included in the line-based form-measuring system. By means of a fast white-light scan, the optimum angle of the sensor (with respect to the surface of the specimen) is determined in advance, before scanning the specimen using the line-based sinusoidal phase shifting interferometer. This produces accurate measurement results and makes it possible to also measure non-rotational specimens.

In this paper, the setup of the line-based form-measuring system is introduced and the measurement strategy of the sensor adjustment using an additional white-light interferometer is presented. Furthermore, the traceability chain of the system and the main error influences are discussed. Examples of form measurement results are shown.
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Sören Laubach, Gerd Ehret, Jörg Riebling, Peter Lehmann, "Combination of a fast white-light interferometer with a phase shifting interferometric line sensor for form measurements of precision components", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103291D (26 June 2017); doi: 10.1117/12.2269520; https://doi.org/10.1117/12.2269520
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