26 June 2017 Development of metrology for freeform optics in reflection mode
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Abstract
The increased range of manufacturable freeform surfaces offered by the new fabrication techniques is giving opportunities to incorporate them in the optical systems. However, the success of these fabrication techniques depends on the capabilities of metrology procedures and a feedback mechanism to CNC machines for optimizing the manufacturing process. Therefore, a precise and in-situ metrology technique for freeform optics is in demand. Though all the techniques available for aspheres have been extended for the freeform surfaces by the researchers, but none of the techniques has yet been incorporated into the manufacturing machine for in-situ measurement. The most obvious reason is the complexity involved in the optical setups to be integrated in the manufacturing platforms. The Shack-Hartmann sensor offers the potential to be incorporated into the machine environment due to its vibration insensitivity, compactness and 3D shape measurement capability from slope data. In the present work, a measurement scheme is reported in which a scanning Shack-Hartmann Sensor has been employed and used as a metrology tool for measurement of freeform surface in reflection mode. Simulation studies are conducted for analyzing the stitching accuracy in presence of various misalignment errors. The proposed scheme is experimentally verified on a freeform surface of cubic phase profile.
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Dali R. Burada, Dali R. Burada, Kamal K. Pant, Kamal K. Pant, Vinod Mishra, Vinod Mishra, Mohamed Bichra, Mohamed Bichra, Gufran S. Khan, Gufran S. Khan, Stefan Sinzinger, Stefan Sinzinger, Chandra Shakher, Chandra Shakher, } "Development of metrology for freeform optics in reflection mode", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103291K (26 June 2017); doi: 10.1117/12.2270284; https://doi.org/10.1117/12.2270284
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