26 June 2017 3D interferometric shape measurement technique using coherent fiber bundles
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In-situ 3-D shape measurements with submicron shape uncertainty of fast rotating objects in a cutting lathe are expected, which can be achieved by simultaneous distance and velocity measurements. Conventional tactile methods, coordinate measurement machines, only support ex-situ measurements. Optical measurement techniques such as triangulation and conoscopic holography offer only the distance, so that the absolute diameter cannot be retrieved directly. In comparison, laser Doppler distance sensors (P-LDD sensor) enable simultaneous and in-situ distance and velocity measurements for monitoring the cutting process in a lathe. In order to achieve shape measurement uncertainties below 1 μm, a P-LDD sensor with a dual camera based scattered light detection has been investigated. Coherent fiber bundles (CFB) are employed to forward the scattered light towards cameras. This enables a compact and passive sensor head in the future. Compared with a photo detector based sensor, the dual camera based sensor allows to decrease the measurement uncertainty by the order of one magnitude. As a result, the total shape uncertainty of absolute 3-D shape measurements can be reduced to about 100 nm.
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Hao Zhang, Hao Zhang, Robert Kuschmierz, Robert Kuschmierz, Jürgen Czarske, Jürgen Czarske, } "3D interferometric shape measurement technique using coherent fiber bundles", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032924 (26 June 2017); doi: 10.1117/12.2269939; https://doi.org/10.1117/12.2269939

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