26 June 2017 Revealing features of different optical shaping technologies by a point diffraction interferometer
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Almost hidden residual defects of a test surface can be revealed using high precision instrument such as a point diffraction interferometer (PDI). In general, PDI is engaged to display the figure of a surface or wavefront with subnanometer accuracy paying attention to low-frequency configurations. Such technique is suited to test EUV or X-ray optics. The tool described in the paper is able to map absolute profile deviations of several angstroms and therefore it provides a new vision of a surface under test of various quality, e.g. detects specific characteristics which immediately disclose either lapping or diamond turning has been used to form the substrate. Such inspection may help optimize the processes in early stage of shape forming before final configuring.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nikolay Voznesenskiy, Nikolay Voznesenskiy, Mariia Voznesenskaia, Mariia Voznesenskaia, Diwaker Jha, Diwaker Jha, Heidi Ottevaere, Heidi Ottevaere, Małgorzata Kujawińska, Małgorzata Kujawińska, Maciej Trusiak, Maciej Trusiak, Kamil Liżewski, Kamil Liżewski, } "Revealing features of different optical shaping technologies by a point diffraction interferometer", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103293X (26 June 2017); doi: 10.1117/12.2270116; https://doi.org/10.1117/12.2270116

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