26 June 2017 Vibration compensated high-resolution scanning white-light Linnik-interferometer
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Abstract
We present a high-resolution Linnik scanning white-light interferometer (SWLI) with integrated distance measuring interferometer (DMI) for close-to-machine applications in the presence of environmental vibrations. The distance, measured by DMI during the depth-scan, is used for vibration compensation of SWLI signals. The reconstruction of the white-light interference signals takes place after measurement by reordering the captured images in accordance with their real positions obtained by the DMI and subsequent trigonometrical approximation. This system is the further development of our previously presented Michelson-interferometer. We are able to compensate for arbitrary vibrations with frequencies up to several kilohertz and amplitudes in the lower micrometer range. Completely distorted SWLI signals can be reconstructed and the surface topography can be obtained with high accuracy. We demonstrate the feasibility of the method by examples of practical measurements with and without vibrational disturbances.
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Stanislav Tereschenko, Peter Lehmann, Pascal Gollor, Peter Kuehnhold, "Vibration compensated high-resolution scanning white-light Linnik-interferometer", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032940 (26 June 2017); doi: 10.1117/12.2270226; https://doi.org/10.1117/12.2270226
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