26 June 2017 Broadband interferometric characterisation of nano-positioning stages with sub-10 pm resolution
Author Affiliations +
Abstract
A traceable calibration setup for investigation of the quasi-static and the dynamic performance of nano-positioning stages is detailed, which utilizes a differential plane-mirror interferometer with double-pass configuration from the National Physical Laboratory (NPL). An NPL-developed FPGA-based interferometric data acquisition and decoding system has been used to enable traceable quasi-static calibration of nano-positioning stages with high resolution. A lockin based modulation technique is further introduced to quantitatively calibrate the dynamic response of moving stages with a bandwidth up to 100 kHz and picometer resolution. First experimental results have proven that the calibration setup can achieve under nearly open-air conditions a noise floor lower than 10 pm/sqrt(Hz). A pico-positioning stage, that is used for nanoindentation with indentation depths down to a few picometers, has been characterized with this calibration setup.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhi Li, Uwe Brand, Helmut Wolff, Ludger Koenders, Andrew Yacoot, Prabowo Puranto, "Broadband interferometric characterisation of nano-positioning stages with sub-10 pm resolution", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032944 (26 June 2017); doi: 10.1117/12.2270262; https://doi.org/10.1117/12.2270262
PROCEEDINGS
9 PAGES


SHARE
Back to Top