26 June 2017 Evaluation of laser ablation crater relief by white light micro interferometer
Author Affiliations +
A multi-view scanning method is suggested to assess a complicated surface relief by white light interferometer. Peculiarities of the method are demonstrated on a special object in the form of quadrangular pyramid cavity, which is formed at measurement of micro-hardness of materials using a hardness gauge. An algorithm of the joint processing of multi-view scanning results is developed that allows recovering correct relief values. Laser ablation craters were studied experimentally, and their relief was recovered using the developed method. It is shown that the multi-view scanning reduces ambiguity when determining the local depth of the laser ablation craters micro relief. Results of experimental studies of the multi-view scanning method and data processing algorithm are presented.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Igor Gurov, Igor Gurov, Mikhail Volkov, Mikhail Volkov, Ekaterina Zhukova, Ekaterina Zhukova, Nikita Ivanov, Nikita Ivanov, Nikita Margaryants, Nikita Margaryants, Andrey Potemkin, Andrey Potemkin, Andrey Samokhvalov, Andrey Samokhvalov, Svetlana Shelygina, Svetlana Shelygina, } "Evaluation of laser ablation crater relief by white light micro interferometer", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103294I (26 June 2017); doi: 10.1117/12.2272022; https://doi.org/10.1117/12.2272022

Back to Top