Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion

Martin Hammerschmidt; Martin Weiser; Xavier Garcia Santiago; Lin Zschiedrich; Bernd Bodermann; Sven Burger

doi:10.1117/12.2270596

26 June 2017 Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion

Martin Hammerschmidt, Martin Weiser, Xavier Garcia Santiago, Lin Zschiedrich, Bernd Bodermann, Sven Burger

Proceedings Volume 10330, Modeling Aspects in Optical Metrology VI; 1033004 (2017) https://doi.org/10.1117/12.2270596
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.

Citation Download Citation

Martin Hammerschmidt, Martin Weiser, Xavier Garcia Santiago, Lin Zschiedrich, Bernd Bodermann, and Sven Burger "Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion", Proc. SPIE 10330, Modeling Aspects in Optical Metrology VI, 1033004 (26 June 2017); https://doi.org/10.1117/12.2270596

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