26 June 2017 Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion
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Abstract
We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.
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Martin Hammerschmidt, Martin Hammerschmidt, Martin Weiser, Martin Weiser, Xavier Garcia Santiago, Xavier Garcia Santiago, Lin Zschiedrich, Lin Zschiedrich, Bernd Bodermann, Bernd Bodermann, Sven Burger, Sven Burger, } "Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion", Proc. SPIE 10330, Modeling Aspects in Optical Metrology VI, 1033004 (26 June 2017); doi: 10.1117/12.2270596; https://doi.org/10.1117/12.2270596
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