26 June 2017 Experimental light scattering by small particles: first results with a novel Mueller matrix scatterometer
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Abstract
We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to μm-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.
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Antti Penttilä, Antti Penttilä, Göran Maconi, Göran Maconi, Ivan Kassamakov, Ivan Kassamakov, Maria Gritsevich, Maria Gritsevich, Petteri Helander, Petteri Helander, Tuomas Puranen, Tuomas Puranen, Edward Hæggström, Edward Hæggström, Karri Muinonen, Karri Muinonen, } "Experimental light scattering by small particles: first results with a novel Mueller matrix scatterometer", Proc. SPIE 10330, Modeling Aspects in Optical Metrology VI, 103300A (26 June 2017); doi: 10.1117/12.2267863; https://doi.org/10.1117/12.2267863
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