Dielectric function parameterization by penalized splines

Dmitriy V. Likhachev

doi:10.1117/12.2270259

Abstract

In this article, we investigate the penalized spline (P-spline) approach to restrict flexibility of dielectric function parameterization by B-splines and prevent overfitting of the ellipsometric data. The penalty degree is easily controlled by a certain smoothing parameter. The P-spline approach offers a number of advantages over well-established B-spline parameterization. First of all, it typically uses an equidistant knot arrangement which simplifies the construction of the roughness penalties and makes it computationally efficient. Since P-splines possess the “power of the penalty” property, a selection of the number of knots is no longer crucial, as long as there is a minimum knot number to capture all significant spatial variability of the data curves. We demonstrate the proposed approach by real-data application with ellipsometric spectra from aluminum-coated sample.

Citation Download Citation

Dmitriy V. Likhachev, Dmitriy V. Likhachev, } "Dielectric function parameterization by penalized splines", Proc. SPIE 10330, Modeling Aspects in Optical Metrology VI, 103301J (26 June 2017); doi: 10.1117/12.2270259; https://doi.org/10.1117/12.2270259

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years