Structural influence of a spatial light modulator on generated wavefronts for speckle-based shape measurement

Laura Aulbach; Félix Salazar Bloise; Min Lu; Shengjia Wang; Alexander W. Koch

doi:10.1117/12.2269453

26 June 2017 Structural influence of a spatial light modulator on generated wavefronts for speckle-based shape measurement

Laura Aulbach, Félix Salazar Bloise, Min Lu, Shengjia Wang, Alexander W. Koch

Author Affiliations +

Proceedings Volume 10334, Automated Visual Inspection and Machine Vision II; 1033403 (2017) https://doi.org/10.1117/12.2269453
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

The inspection of technical surfaces is often performed by two-wavelength electronic speckle-pattern interferometry (ESPI) combined with a phase-shifting procedure. As in conventional specular interferometry, the characteristic fringe spacing in the generated interferogram is defined by the applied wavelengths and the sensitivity is therefore constant in one fringe pattern. Subsequently, this technique is limited to surface structures with similar phase gradients and low structural density. To measure more complex structures, a high-resolution generated reference wavefront (HRGW) is adapted to the measurement object for local sensitivity adaption. The feasibility of this principle is directly linked to the functionality of the used spatial light modulator (SLM). A key factor of a proper phase-control is the structural setup of the SLM. In this article, the general influence of the microstructure of SLMs in adaptive ESPI is evaluated.

Citation Download Citation

Laura Aulbach, Félix Salazar Bloise, Min Lu, Shengjia Wang, and Alexander W. Koch "Structural influence of a spatial light modulator on generated wavefronts for speckle-based shape measurement", Proc. SPIE 10334, Automated Visual Inspection and Machine Vision II, 1033403 (26 June 2017); https://doi.org/10.1117/12.2269453

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