1 August 2017 Mathematical model for CO2 laser high precision ablation of fused silica
Author Affiliations +
Proceedings Volume 10339, Pacific Rim Laser Damage 2017: Optical Materials for High-Power Lasers; 1033909 (2017) https://doi.org/10.1117/12.2272551
Event: Pacific Rim Laser Damage 2017: Optical Materials for High Power Lasers, 2017, Shanghai, China
Optics manufactured by mechanical grinding and polishing inevitably will bring surface/subsurface damages and defects during the machining process. Laser polishing has been demonstrated as a technique capable of achieving ultra-smooth surface with no damage and low-defects, but by far optics polished by this technology are only sufficient for illumination applications. To achieve high quality optics, high precision laser ablation has been proved to be a promising technology for shape correction. With pulsed CO2 laser, high precision laser ablation can be performed by direct evaporation of unwanted surface asperities. To acquire nanometer scale high precision ablation, an accurate control and meticulous adjustment of temperature should be needed. Herein, a mathematical model has been established to assist the understanding of the thermal mechanism of CO2 laser ablation and subsequently a series of simulations have been extended to investigate the phase change of evaporation. The temperature of fused silica irradiated by CO2 laser can be controlled via laser power and pulse duration. To achieve nanometer ablation depth, a gentle evaporation regime at low laser intensity is necessary. The results indicated that the ablation depth linearly depend on laser fluence and depth control levels of nanometer are obtainable with the control of laser fluence.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ting He, Ting He, Jianda Shao, Jianda Shao, Chaoyang Wei, Chaoyang Wei, Zhigang Jiang, Zhigang Jiang, Jiaoling Zhao, Jiaoling Zhao, } "Mathematical model for CO2 laser high precision ablation of fused silica", Proc. SPIE 10339, Pacific Rim Laser Damage 2017: Optical Materials for High-Power Lasers, 1033909 (1 August 2017); doi: 10.1117/12.2272551; https://doi.org/10.1117/12.2272551


Closed-loop next generation laser polishing
Proceedings of SPIE (August 06 2018)
Laser polishing of glass
Proceedings of SPIE (October 10 2015)
Process for repairing large scratches on fused silica optics
Proceedings of SPIE (October 10 2015)

Back to Top