Plasmon resonance sensors for compact plasmonic integrated device (Conference Presentation)

Masanobu Haraguchi; Shun Kamada; Hiroyuki Okamoto; Toshihiro Okamoto; Salah E. El-Zohary

doi:10.1117/12.2275421

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18 October 2017 Plasmon resonance sensors for compact plasmonic integrated device (Conference Presentation)

Masanobu Haraguchi, Shun Kamada, Hiroyuki Okamoto, Toshihiro Okamoto, Salah E. El-Zohary

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Proceedings Volume 10346, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XV; 103460B (2017) https://doi.org/10.1117/12.2275421
Event: SPIE Nanoscience + Engineering, 2017, San Diego, California, United States

Abstract

Surface plasmon polariton (SPP) provide the field enhancement and localization beyond the diffraction limit of light. By using SPP, we have numerically designed tiny resonance sensors as plasmonic integrated devices with silver or gold as metal material for near infrared region of light. We will present our recent work for the sensors. The sensors are the combination of the plasmon resonator and MIM channel plasmon waveguide with the gap of ~150 nm and the hight of ~1.5 micron. The typical area size of sensor is order of 1 square micrometers and their sensitivity for temperature or stress change is comparable to current optical sensors. We have fabricated some fundamental structure of the device by using the electron beam lithography and will show experimental optical characteristics for IR region.

Conference Presentation

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Masanobu Haraguchi, Shun Kamada, Hiroyuki Okamoto, Toshihiro Okamoto, and Salah E. El-Zohary "Plasmon resonance sensors for compact plasmonic integrated device (Conference Presentation)", Proc. SPIE 10346, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XV, 103460B (18 October 2017); https://doi.org/10.1117/12.2275421

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