25 August 2017 Plasmonic detection of possible defects in multilayer nanohole array consisting of essential materials in simplified STT-RAM cell
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Plasmonic nanostructures are highly used for sensing purposes since they support plasmonic modes which make them highly sensitive to the refractive index change of their surrounding medium. Therefore, they can also be used to detect changes in optical properties of ultrathin layer films in a multilayer plasmonic structure. Here, we investigate the changes in optical properties of ultrathin films of macro structures consisting of STT-RAM layers. Among the highest sensitive plasmonic structures, nanohole array has attracted many research interest because of its ease of fabrication, small footprint, and simplified optical alignment. Hence it is more suitable for defect detection in STT-RAM geometries. Moreover, the periodic nanohole pattern in the nanohole array structure makes it possible to couple the light to the surface plasmon polariton (SPP) mode supported by the structure. To assess the radiation damages and defects in STT-RAM cells we have designed a multilayer nanohole array based on the layers used in STT-RAM structure, consisting 4nm- Ta/1.5nm-CoFeB/2nm-MgO/1.5nm-CoFeB/4nm-Ta layers, all on a 300nm silver layer on top of a PEC boundary. The nanoholes go through all the layers and become closed by the PEC boundary on one side. The dimensions of the designed nanoholes are 313nm depth, 350nm diameter, and 700nm period. Here, we consider the normal incidence of light and investigate zeroth-order reflection coefficient to observe the resonance. Our simulation results show that a 10% change in refractive index of the 2nm-thick MgO layer leads to about 122GHz shift in SPP resonance in reflection pattern.
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Parinaz Sadri-Moshkenani, Parinaz Sadri-Moshkenani, Mohammad Wahiduzzaman Khan, Mohammad Wahiduzzaman Khan, Qiancheng Zhao, Qiancheng Zhao, Ilya Krivorotov, Ilya Krivorotov, Mikael Nilsson, Mikael Nilsson, Nader Bagherzadeh, Nader Bagherzadeh, Ozdal Boyraz, Ozdal Boyraz, } "Plasmonic detection of possible defects in multilayer nanohole array consisting of essential materials in simplified STT-RAM cell", Proc. SPIE 10346, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XV, 1034639 (25 August 2017); doi: 10.1117/12.2277545; https://doi.org/10.1117/12.2277545

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