31 August 2017 All dielectric metasurface nano-fabrication based on TiO2 phase shifters
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Abstract
All dielectric metasurface of low loss TiO2 in visible wavelengths was devised forming subwavelength-scale nanostructures. DC-magnetron sputtering of oxygen-reduced TiOx (x<;2) target with reactive oxygen gas made dense amorphous TiO2 layers of 1.35nm Ra. A 380nm-thick TiO2 has low extinction coefficient (k) under 1x10-5, transparency of 98.33% and high refractive index (n) of 2.55 at 485nm wavelength. Highly precise TiO2 meta-atoms were successfully defined with 100nm-300nm feature size. Phase shift properties of TiO2 metasurface were measured. Finally, we constructed dielectric metaphotonic platform for various optical devices such as band pass filters, flat lens and beam deflectors in visible ranges.
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Jeong Yub Lee, Jeong Yub Lee, Jaekwan Kim, Jaekwan Kim, Kiyeon Yang, Kiyeon Yang, Yongsung Kim, Yongsung Kim, Byonggwon Song, Byonggwon Song, Jaeduck Jang, Jaeduck Jang, Soohwan Sul, Soohwan Sul, Chang Seung Lee, Chang Seung Lee, } "All dielectric metasurface nano-fabrication based on TiO2 phase shifters", Proc. SPIE 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV, 103540I (31 August 2017); doi: 10.1117/12.2272148; https://doi.org/10.1117/12.2272148
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