29 August 2017 Effect of different AFM micro cantilever in fluid on the rough surface topography quality close to the surface
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Abstract
The use of higher vibration modes and different geometries of the AFM piezoelectric micro cantilever (MC) is affected by the surface topography quality in a liquid medium. Therefore, utilizing an appropriate geometry and vibration mode is of a great importance. This paper analyzes AFM MC types with rectangular, dagger and V-shaped geometries in the noncontact and tapping modes in a liquid medium for rough surfaces in Nanoscale. The modified couple stress theory (MCS) in a liquid medium according to Timoshenko beam theory is used in order to enhance the accuracy of equations. In addition, the differential quadrature (DQ) method has been used to solve the equations. Identification of environmental forces helps an exact investigation of the system vibration amplitude. Investigating the effect of geometric and force parameters on the MC vibration behavior leads to understanding the system and to design it properly in a liquid medium. Also, due to oscillating the MC near the sample surface, the effect of interaction forces between the sample surface and the MC, including van der Waals, contact and squeeze forces is analyzed in a liquid medium in addition to the hydrodynamic forces. Furthermore, due to the sever reduction of the MC amplitude caused by the squeeze force; the MC is angled in comparison with the horizontal surface.
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A. H. Korayem, A. H. Korayem, M. H. Korayem, M. H. Korayem, } "Effect of different AFM micro cantilever in fluid on the rough surface topography quality close to the surface", Proc. SPIE 10355, Nanobiosystems: Processing, Characterization, and Applications X, 103550M (29 August 2017); doi: 10.1117/12.2274898; https://doi.org/10.1117/12.2274898
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