7 September 2017 Substrate heating effects on ferromagnetic CoFeB thin films
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Damping in ferromagnetic alloys such, as Co40Fe40B20 are very sensitive to thermal effects both during deposition and post deposition. Depositions using and alloyed Co40Fe40B20 target were done on si (100) and amorphous glass substrates at room temperature up to 500°C. The samples deposited onto si (100) at 500°C crystalized into face centered cubic (110) Co7Fe3 whereas the samples on glass remained amorphous. The gilbert damping parameter α was reduced from .0141 to .0095 when deposited on glass however increased from .0097 to .0131 on si (100) at temperatures from 20°C- 400°C. At low deposition temperatures on glass large metallic grains of 50-75nm were found. The crystallization of Co40Fe40B20 to Co7Fe3 at 500°C resulted in broader ferromagnetic resonance peak-to-peak line widths of 1050 Oe and increased in plane coercivity values of 200 Oe compared to 35 Oe and 5 Oe for amorphous Co40Fe40B20. Post deposition annealing of Co40Fe40B20 on si (100) from 20-350°C showed reductions in damping from .0131 to .0076 and effective magnetization increased from 11.8 kOe to 13.3 kOe.
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Ryan A. O'Dell, Ryan A. O'Dell, Adam B. Phillips, Adam B. Phillips, Daniel G. Georgiev, Daniel G. Georgiev, Michael J. Heben, Michael J. Heben, } "Substrate heating effects on ferromagnetic CoFeB thin films ", Proc. SPIE 10357, Spintronics X, 103573J (7 September 2017); doi: 10.1117/12.2291567; https://doi.org/10.1117/12.2291567

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