1 May 1989 Hologram Interferometer To Calibrate And Measure The Straightness In Micropositioning Equipment
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Proceedings Volume 1036, Precision Instrument Design; (1989) https://doi.org/10.1117/12.950967
Event: SPIE Advanced Processing Technologies for Optical and Electronic Devices (colocated wth OPTCON), 1988, Santa Clara, CA, United States
Abstract
A symmetric Inline Hologram Interferometer is designed to verify and measure the straigthness in a travel distance of 10mm., for a transversal movement from 2.μm up to 20.μm. In this type of hologram interferometer the light source illuminating the object, the object itself, the hologram and the optical viewing system are aligned. As an object a transmitting diffuser plate is used. The diffuser plate is placed on the translation stage that will be moving in the direction of the optical axis of the viewing system. In order to define the parameters of this instrument, an analysis of the visibility function and the optical path difference is made. Experimental results are presented.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Martin Celaya, Ignacio Rizo, Efren Mercado, "Hologram Interferometer To Calibrate And Measure The Straightness In Micropositioning Equipment", Proc. SPIE 1036, Precision Instrument Design, (1 May 1989); doi: 10.1117/12.950967; https://doi.org/10.1117/12.950967
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