23 August 2017 Design and test of precision vertical and horizontal linear nanopositioning flexure stages with centimeter-level travel range for x-ray instrumentation
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Abstract
The ever-increasing spatial resolution of nanofocusing hard x-ray optics, coupled with the need for long working distances and spectroscopic imaging, requires stages that translate optics and samples over millimeters with trajectory errors of under 10 nm. To overcome the performance limitations of precision ball-bearing-based or roller-bearing-based linear stage systems, compact vertical and horizontal linear nanopositioning flexure stages, with centimeter-level travel range, have been designed and tested at the Advanced Photon Source (APS) for x-ray instrumentation applications. The mechanical design and finite element analyses of the flexural stages, as well as its preliminary test results with laser interferometers are described in this paper.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Deming Shu, Deming Shu, Barry Lai, Barry Lai, Steven Kearney, Steven Kearney, Jayson Anton, Jayson Anton, Wenjun Liu, Wenjun Liu, Jorg Maser, Jorg Maser, Christian Roehrig, Christian Roehrig, Jonathan Z. Tischler, Jonathan Z. Tischler, } "Design and test of precision vertical and horizontal linear nanopositioning flexure stages with centimeter-level travel range for x-ray instrumentation", Proc. SPIE 10371, Optomechanical Engineering 2017, 103710C (23 August 2017); doi: 10.1117/12.2274168; https://doi.org/10.1117/12.2274168
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