23 August 2017 Removal of diamond turning marks with magneto-rheological finishing
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A magneto-rheological finishing (MRF) process for the post-treatment of diamond turning is presented to remove the periodic micro structures and sub-surface damages with improvement of the original figure and surface roughness. An off-axis aspherical mirror with electro-less nickel-phosphorus plated surface was machined by a Single point diamond turning machine (SPDTM) and MRF polisher. The machined surfaces were examined by a scanning low-coherence interferometer, and the technique of Fast Fourier Transformation (FFT) and Power Spectrum Density (PSD) were introduced to evaluate the residual diamond turning marks on the turned and polished surfaces. The turning marks, which was clearly visible on the diamond turned surface, were absolutely removed after MR process, and the surface roughness of the machined surface was improved from 6 nm(Sa) and 7 nm (Sq) to 2 nm(Sa) and 3 nm (Sq). Consequently, the experimental results indicate that MRF is suitable for removing periodic micro-patterns caused by diamond turning process with the progress of the original figure and surface roughness.
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Min-Woo Jeon, Min-Woo Jeon, Sangwon Hyun, Sangwon Hyun, Byeong-Joon Jeong, Byeong-Joon Jeong, I-Jong Kim, I-Jong Kim, Geon-Hee Kim, Geon-Hee Kim, } "Removal of diamond turning marks with magneto-rheological finishing", Proc. SPIE 10371, Optomechanical Engineering 2017, 103710V (23 August 2017); doi: 10.1117/12.2274028; https://doi.org/10.1117/12.2274028

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