30 November 2017 Front Matter: Volume 10373
Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 10373, including the Title Page, Copyright information, Table of Contents, Introduction (if any), and Conference Committee listing.

The papers in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. Additional papers and presentation recordings may be available online in the SPIE Digital Library at SPIEDigitalLibrary.org.

The papers reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon.

Please use the following format to cite material from these proceedings:

Author(s), “Title of Paper,” in Applied Optical Metrology II, edited by Erik Novak, James D. Trolinger, Proceedings of SPIE Vol. 10373 (SPIE, Bellingham, WA, 2017) Seven-digit Article CID Number.

ISSN: 0277-786X

ISSN: 1996-756X (electronic)

ISBN: 9781510612037

ISBN: 9781510612044 (electronic)

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Paper Numbering: Proceedings of SPIE follow an e-First publication model. A unique citation identifier (CID) number is assigned to each article at the time of publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online and print versions of the publication. SPIE uses a seven-digit CID article numbering system structured as follows:

  • The first five digits correspond to the SPIE volume number.

  • The last two digits indicate publication order within the volume using a Base 36 numbering system employing both numerals and letters. These two-number sets start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B … 0Z, followed by 10-1Z, 20-2Z, etc. The CID Number appears on each page of the manuscript.

Authors

Numbers in the index correspond to the last two digits of the seven-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first five digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B…0Z, followed by 10-1Z, 20-2Z, etc.

Ahn, Jae Sung, 0T

Altmann, Michal, 10

Altmannova, Lada, 10

Arai, Y., 05

Aulbach, Laura, 0E

Balachandar, S., 13

Buckner, Benjamin D., 0R

Burt, Travis C., 0O

Butkiewicz, Mark, 0H

Chang, S. T., 0V

Coyle, Laura E., 0I

Davies, Angela D., 02, 0H, 0S

Deng, Qinyuan, 0G

Dimas, Dave, 0D

Dioumaev, Andrei K., 0D, 0P

Du, Jinglei, 09, 0A

Dunn-Rankin, Derek, 0P

Eom, Joo Beom, 0T

Evans, Christopher J., 02, 0H, 0S

Fan, Jingjing, 06

Fang, Meiqi, 12

Fisher, Mark R., 0O

Frater, Eric H., 0I

Ganesan, A. R., 0C

Gong, Zhidong, 0J, 0K

Guo, Hongwei, 0U

Havlis, Ondrej, 10

Horvath, Tomas, 10

Hosseinimakarem, Zahra, 02

Hu, Song, 0G

Huang, T. M., 0V

Hula, Miloslav, 10

Kim, Ju Wan, 0T

Koch, Alexander W., 0E

Kong, Ming, 0J, 0K

Kono, K., 0M

Krishnan Maliackal, Akhil, 0C

Kujawinska, M., 0Q

Kundrat, Jan, 10 Lal, Amit K., 0D

Leach, Richard K., 04

Lee, Byeong Ha, 0T

L’Esperance, Drew, 0R

Li, Yongqian, 06

Li, Zhaoxue, 09

Liang, Rongguang, 0J, 0K

Lin, Y. C., 0V

Lu, Min, 0E

Ma, Liqun, 06

Ma, Yueyang, 12

Mani, Annamalai, 0C

Minniti,

Marco, 0P

Mo, Linhai, 0J, 0K

Mo, Shuhui, 0J, 0K

Morita, Y., 0M

Munster, Petr, 10

Nakamachi, E., 0M

Novak, Erik, 0B

Novak, Matthew J., 07

Park, Anjin, 0T

Piano, Samanta, 04

Pöller, Franziska, 0E

Pravdivtsev, Alexander, 0N

Qiu, Xiaodong, 09

Radil, Jan, 10

Sims-Waterhouse, Danny, 04

Sitnik, R., 0Q

Skoda, Pavel, 10

Slapak, Martin, 10

Smotlacha, Vladimir, 10

Strąkowski, Marcin R., 0Z

Tang, Yan, 0G

Trolinger, James D., 0D, 0P

Tsay, H. L., 0V

Vann, Trent, 0H

Velc, Radek, 10

Vipin, K., 13

Vohnout, Rudolf, 10

Vojtech, Josef, 10

Walecki, Wojtek J., 0N

Wang, Chao, 0K

Wang, Daodang, 0J, 0K

Wang, Shengjia, 0E

Wieloszynska, Aleksandra, 0Z

Xiao, Zhaoxian, 0L

Xie, Linguo, 0A

Xie, Zhongmin, 0J

Xu, Ping, 0J, 0K

Yang, Pao-Keng, 0W

Zhang, Bin, 0S

Zhang, Chunwei, 12

Zhang, Hangying, 0L

Zhang, Ruihua, 0U

Zhang, Zhiyou, 09, 0A

Zhao, Hong, 12

Zhao, Jun, 0J, 0K

Zhao, Lixin, 0G

Zhao, Zixin, 0L

Zhou, Changquan, 12

Zhou, Yi, 0G

Zhou, Zili, 06

Zhuang, Yao-Kai, 0W

Ziaee, Ali, 0P

Ziegert, John, 0S

Conference Committee

Program Track Chair

  • H. Philip Stahl, NASA Marshall Space Flight Center (United States)

Conference Chairs

  • Erik Novak, 4D Technology Corporation (United States)

  • James D. Trolinger, MetroLaser, Inc. (United States)

Conference Program Committee

  • Anand Krishna Asundi, d’Optron Pte. Ltd. (Singapore)

  • Angela Davies, The University of North Carolina at Charlotte (United States)

  • Peter J. de Groot, Zygo Corporation (United States)

  • Sen Han, University of Shanghai for Science and Technology (China)

  • Kevin G. Harding, GE Global Research (United States)

  • Pengda Hong, Lehigh University (United States)

  • Richard K. Leach, National Physical Laboratory (United Kingdom) Kate Medicus, Optimax Systems, Inc. (United States)

  • Matthew J. Novak, Technical Optics, Inc. (United States)

  • Levent Onural, Bilkent University (Turkey)

  • Peter Roos, Bridger Photonics, Inc. (United States)

  • Toru Yoshizawa, 3D Associates (Japan)

Session Chairs

  • 1 3D Shape Measurement

    Erik Novak, 4D Technology Corporation (United States)

  • 2 Polarization Measurement and Techniques

    Kate Medicus, Optimax Systems, Inc. (United States)

  • 3 Fine Scale Feature Metrology

    Angela Davies, The University of North Carolina at Charlotte (United States)

  • 4 Optical Testing

    Pengda Hong, Lehigh University (United States)

  • 5 Spectroscopic Techniques and Metrology

    James D. Trolinger, MetroLaser, Inc. (United States)

  • 6 Fringe Projection and Structured Light

    Matt J. Novak, Technical Optics LLC (United States)

Introduction

The methods of optical metrology have advanced significantly since the times of the early interferometers of the late 19th century. Fast cameras and processing make a whole range of new methods available today for looking at everything from fine microstructures to large astronomical systems. The papers presented in this conference focused on optical methods beyond traditional white-light or monochromatic-laser interferometric methods to other optical means of making precision measurements. They discuss novel uses of polarization, pattern projection, deflectrometry spectroscopy, and other means to measure everything from fine semiconductor structures to aircraft components to subway tunnel geometry. We hope you enjoy the novel ways in which optical metrology is enabling various new applications and industries.

Erik Novak

James D. Trolinger

© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
} "Front Matter: Volume 10373", Proc. SPIE 10373, Applied Optical Metrology II, 1037301 (30 November 2017); doi: 10.1117/12.2295987; https://doi.org/10.1117/12.2295987
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