23 August 2017 Vibration-immune compact optical metrology to enable production-line quantification of fine scale features
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Proceedings Volume 10373, Applied Optical Metrology II; 103730B (2017); doi: 10.1117/12.2276056
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States
Abstract
Inspectors attempting to quantify defects and fine-scale features on precision machined surfaces are often limited by the capabilities and form factors of existing measurement techniques. Inspectors most often rely on imprecise and inaccurate visual comparison tools or pin gauges to determine the geometry of surface features. This paper will describe key attributes of a metrology system for quantification of small features in a production environment and present critical performance tests on the system including vertical and lateral resolution and correlation with other techniques. Additionally, various new applications will be discussed which are fundamentally enabled through access to a portable, vibration-immune, system that is both quantitative and easy-to-use.
Conference Presentation
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Erik Novak, "Vibration-immune compact optical metrology to enable production-line quantification of fine scale features", Proc. SPIE 10373, Applied Optical Metrology II, 103730B (23 August 2017); doi: 10.1117/12.2276056; http://dx.doi.org/10.1117/12.2276056
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KEYWORDS
Inspection

Metrology

Optical metrology

3D metrology

Image resolution

In situ metrology

Interferometry

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