23 August 2017 General testing method for refractive surfaces based on reverse Hartmann test
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Abstract
The testing technique with high dynamic range is required to meet the measurement of refractive wavefront with large distortion from test refractive surface. A general deflectometric method based on reverse Hartmann test is proposed to test refractive surfaces. Ray tracing of the modeled testing system is performed to reconstruct the refractive wavefront from test surface, in which computer-aided optimization of system geometry is performed to calibrate the geometrical error. For the refractive wavefront error with RMS 255 μm, the testing precision better than 0.5 μm is achieved.
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Ping Xu, Ping Xu, Daodang Wang, Daodang Wang, Zhidong Gong, Zhidong Gong, Zhongmin Xie, Zhongmin Xie, Rongguang Liang, Rongguang Liang, Ming Kong, Ming Kong, Jun Zhao, Jun Zhao, Linhai Mo, Linhai Mo, Shuhui Mo, Shuhui Mo, } "General testing method for refractive surfaces based on reverse Hartmann test", Proc. SPIE 10373, Applied Optical Metrology II, 103730J (23 August 2017); doi: 10.1117/12.2273189; https://doi.org/10.1117/12.2273189
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