23 August 2017 Geometrical error calibration in reflective surface testing based on reverse Hartmann test
Author Affiliations +
In the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of subnanometer is achieved.
Conference Presentation
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Zhidong Gong, Zhidong Gong, Daodang Wang, Daodang Wang, Ping Xu, Ping Xu, Chao Wang, Chao Wang, Rongguang Liang, Rongguang Liang, Ming Kong, Ming Kong, Jun Zhao, Jun Zhao, Linhai Mo, Linhai Mo, Shuhui Mo, Shuhui Mo, } "Geometrical error calibration in reflective surface testing based on reverse Hartmann test", Proc. SPIE 10373, Applied Optical Metrology II, 103730K (23 August 2017); doi: 10.1117/12.2268372; https://doi.org/10.1117/12.2268372

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