Translator Disclaimer
Presentation + Paper
23 August 2017 General testing method for refractive surfaces based on reverse Hartmann test
Author Affiliations +
Abstract
The testing technique with high dynamic range is required to meet the measurement of refractive wavefront with large distortion from test refractive surface. A general deflectometric method based on reverse Hartmann test is proposed to test refractive surfaces. Ray tracing of the modeled testing system is performed to reconstruct the refractive wavefront from test surface, in which computer-aided optimization of system geometry is performed to calibrate the geometrical error. For the refractive wavefront error with RMS 255 μm, the testing precision better than 0.5 μm is achieved.
Conference Presentation
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ping Xu, Daodang Wang, Zhidong Gong, Zhongmin Xie, Rongguang Liang, Ming Kong, Jun Zhao, Linhai Mo, and Shuhui Mo "General testing method for refractive surfaces based on reverse Hartmann test", Proc. SPIE 10373, Applied Optical Metrology II, 103730J (23 August 2017); https://doi.org/10.1117/12.2273189
PROCEEDINGS
8 PAGES + PRESENTATION

SHARE
Advertisement
Advertisement
RELATED CONTENT

Aberrations of a transparent sphere
Proceedings of SPIE (September 20 2010)
Production of high-performance optics
Proceedings of SPIE (August 23 1996)
Polarization aberration control for ArF projection lenses
Proceedings of SPIE (March 16 2009)

Back to Top