22 August 2017 Measurement of low-order aberrations with an autostigmatic microscope
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Proceedings Volume 10377, Optical System Alignment, Tolerancing, and Verification XI; 103770C (2017); doi: 10.1117/12.2274813
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States
Abstract
The addition of a piezo-electric focusing stage and phase retrieval algorithms to a compact, adaptable autostigmatic microscope provides for both improved focus sensitivity during optical system alignment as well as the ability to measure low-order aberrations for system qualification. A description of the instrument and initial results are reported.
Conference Presentation
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William P. Kuhn, "Measurement of low-order aberrations with an autostigmatic microscope", Proc. SPIE 10377, Optical System Alignment, Tolerancing, and Verification XI, 103770C (22 August 2017); doi: 10.1117/12.2274813; https://doi.org/10.1117/12.2274813
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KEYWORDS
Microscopes

Optical alignment

Autocollimators

Phase retrieval

Wavefronts

Collimation

Metrology

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